表面溅射 FeGa 薄膜的 AT 切型石英谐振磁场传感器
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TN384 TH73

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国家自然科学基金(61527813)项目资助


AT-cut quartz resonant magnetic field sensor with surface sputtered FeGa film
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    摘要:

    针对谐振传感器 Q 值低导致输出信号噪声水平高、传感分辨率低的问题,提出 FeGa 薄膜与 AT 切型石英晶片复合的高 品质因数谐振磁场传感器。 AT 切型石英晶片受到交流电压激励以厚度剪切模态振动,FeGa 薄膜在磁场中磁化而受到磁场作 用力并通过层间耦合传递到石英晶片,由于石英晶片具有力频特性,其谐振频率因此会发生改变。 此外,石英晶体低内损耗、高 Q 值的特性使得传感器具有很高的品质因数,可以实现稳定、低噪声的传感输出。 实验结果显示:该谐振磁场传感灵敏度为 0. 2 Hz/ Oe,品质因数达到 46 000 以上,功耗低于 8 μW,最大测量磁场可达 1 200 Oe,具有较宽的磁场测量范围。 该谐振磁场传 感器在高信噪比输出信号、低功耗等方面均具有明显优势,且结构简单、易于加工。

    Abstract:

    Aiming at the problem of low quality factor of the resonant sensor, which will cause high output signal noise and low sensing resolution, a high-quality-factor resonant magnetic field sensor with FeGa film and AT-cut quartz crystal composites is proposed. When excited with ac voltage, the AT-cut quartz wafer will vibrate in thickness-shear mode. The FeGa film is magnetized in the magnetic field, then the film is subjected to the force of the magnetic field, which is transferred to the quartz wafer through interlayer coupling. Due to the force-frequency characteristics of the quartz wafer, its resonant frequency will change. In addition, the proposed sensor has a particularly high quality factor because of the low internal loss and high Q value of the quartz wafer, the stable and low noise sensing output is achieved. Experiment results show that the sensitivity of the resonant magnetic field sensor reaches 0. 2 Hz/ Oe, its quality factor reaches above 46 000 and the power consumption is lower than 8 μW. In addition, the sensor has a wide magnetic field measurement range, and the maximum measured magnetic field reaches 1 200 Oe. The proposed resonant magnetic field sensor has obvious advantages of high signal-to-noise output signal and low power consumption, also has simple structure, and can be fabricated easily.

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张家泰,文玉梅,鲍祥祥,李 平,王 遥.表面溅射 FeGa 薄膜的 AT 切型石英谐振磁场传感器[J].仪器仪表学报,2021,(3):42-49

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  • 在线发布日期: 2023-06-28
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