硅谐振式压力传感器双频合成与误差补偿研究
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TP212 TH812

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山西省重点研发计划(国际科技合作) (201903D421052)、山西省应用基础研究计划(青年基金) (201901D211070)项目资助


Dual-frequency synthesis of the silicon resonant pressure sensor and error compensation research
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    摘要:

    由于新型双“H”型硅谐振式压力传感器与传统振动筒式和单梁硅谐振式等压力传感器在新旧替代方面存在冲突,基于 GD32 单片机定时器计数和中断定时技术,研制了一种双频率采集合成系统。 该系统搭建了基于 GD32F405RGT6 单片机多个 定时器同步计数电路,实现双频 20 ms 同步采集。 在此基础上,提出了一种单片机定时器定时中断控制 I/ O 口翻转电平从而输 出方波的数频转换方法,并设计了一种双频率合成误差补偿方案,使双频合成最大理论误差从 51. 15 Pa 减小为 0. 127 9 Pa。 实 验结果表明,在大气环境-45℃ ~ +85℃ 、大气压力 2 ~ 266 kPa 条件下该系统可正常工作,输出单频范围为 4 ~ 10 kHz,双频采集 合成误差均小于传感器测量量程的 0. 005% 。 该系统数字电路板体积小,可以集成到新型双“H”型硅谐振式压力传感器电路 中,很好地满足了大气压力检测监控用硅谐振式压力传感器双频率采集合成输出的要求。

    Abstract:

    In the replacement from old version to new version, there is a conflict between the new double “H” silicon resonant pressure sensor and the traditional pressure sensor, such as vibration cylinder and single beam silicon resonant. To solve the problem, develops a dual-frequency acquisition and synthesis system, which is based on the GD32 single-chip timer counting and interrupt timing technology. The system builds a multiple timer synchronous counting circuit by using the tiny single-chip microcomputer ( GD32F405RGT6) to realize dual frequency 20 ms synchronous acquisition. On this basis, a new digital frequency conversion method is proposed, which can control the I/ O port flipping level by the timer interrupt of the single-chip microcomputer to outputs square wave. And a dual-frequency synthesis error compensation method is designed to decrease the maximum theoretical error of the dual-frequency synthesis from 51. 15 Pa to 0. 127 9 Pa. Experimental results show that the system can work under -45℃ ~ +85℃ and 2~ 266 kPa. The single frequency range of the system output is 4~ 10 kHz. The dual frequency acquisition and synthesis error is less than 0. 005% of the full pressure scale. The digital circuit board is small and can be integrated into the new double “H” type silicon resonant pressure sensor circuit, which well satisfies the requirement of the dual frequency acquisition and synthesis output for the silicon resonant pressure sensor in atmospheric pressure detection and monitoring.

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高英杰,赵 稔,赵晓丹,张中飞,杨毅彪.硅谐振式压力传感器双频合成与误差补偿研究[J].仪器仪表学报,2021,(1):68-74

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  • 在线发布日期: 2023-06-28
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