Research on flexible temperature-pressure dual-mode sensors based on serrated resistive thin films
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1.Beijing Key Laboratory of Sensors,Beijing University of Information Science and Technology, Beijing 102206,China; 2.School of Mechanical and Electrical Engineering, Beijing University of Information Science and Technology, Beijing 102206,China; 3.College of Science, Beijing University of Information Science and Technology,Beijing 102206,China

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TH165;TN379

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    Abstract:

    To address the issues of insufficient robustness and poor pressure stability in flexible multimodal sensors, this paper proposes a flexible temperature-pressure dual-mode sensor (FTPDMS) based on a sawtooth-shaped resistive film. Mathematical models for the sensor’s temperature-pressure response were established using COMSOL Multiphysics and NI Multisim, and the structural parameters were optimised. Using PI as the sputtering mask, the FTPDMS was fabricated via a process involving metal magnetron sputtering, peeling, and Polydimethylsiloxane(PDMS)elastomer casting. Experimental results indicate that the sensor’s sensitivity within the pressure ranges of 7 Pa to 1 kPa, 1 to 60, and 60 kPa to 100 kPa is -4.59, -0.1 and -0.23 mV/kPa respectively, with nonlinearity of 10.13%, 7.75% and 11.68% respectively. The pressure response time is approximately 303 ms, the lower pressure limit is 7 Pa, the hysteresis is 3.6%, and the repeatability is ≥2 000 cycles; the signal remains stable during constant-pressure testing. Within the temperature range of 27 ℃~67 ℃, the sensitivity is 0.41 mV/℃, the non-linearity is 6.25%, and the temperature response time is approximately 1.5 s. This sensor offers advantages such as a wide measurement range (100 kPa), high sensitivity (-4.59 mV/kPa), fast response (303 ms), high robustness and pressure stability (≥2 000 cycles), and low hysteresis (3.6%). Furthermore, its fabrication process is simple, cost-effective and environmentally friendly, making it suitable for applications in medical health monitoring, electronic skin and smart wearable devices.

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  • Received:
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  • Online: October 13,2026
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