Research on interpolation compensation method for temperature error of piezo-resistive pressure sensor
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TN06;TP212

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    Abstract:

    In order to reduce the adverse effect of environmental temperature change on the reliable measurement of piezoresistive pressure sensor, a compensation method combining cubic spline interpolation and Hermite interpolation is proposed in this paper. Firstly, the calibration data are obtained through the calibration experiment, and the cubic spline interpolation is used to establish the functional relationship between the ambient temperature and the output voltage of the sensor and the pressure to be measured to compensate the temperature error of the sensor. Then the Hermite interpolation is used to construct the mapping relationship between the output voltage and the pressure to be measured to describe the measurement characteristics of the sensor. The results of temperature compensation experiment under two different working conditions show that the maximum qualified error are 2. 414×10 -4 and 6. 129×10 -4 respectively, the average qualified error are 2. 353×10 - 5 and 1. 313×10 -4 respectively, and the variance of qualified error are 1. 751× 10 -9 and 1. 613×10 -8 respectively, zero temperature coefficients are 2. 780×10 -7 and 8. 862×10 -7 , sensitivity temperature coefficients are 1. 952×10 -6 and 3. 672×10 -6 ,which verifies the consistent effectiveness of the compensation performance under different modeling data conditions.

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  • Received:
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  • Online: February 27,2023
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