Design and research of SAW micro-force sensor based on polyline IDT
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TH823

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    Abstract:

    Surface acoustic wave ( SAW) micro-force sensor has the characteristics of easy integration and miniaturization, passive wireless working mode, and has great application potential. Applying it to measure the micro-gap pressure between objects is expected to achieve a high-sensitivity, low-power monitoring level. Aiming at the problem of measurement sensitivity in complex environments, SAW micro-force sensor with a broken-line interdigital transducer (IDT) is designed. The finite element analysis method (FEM) is used to carry out simulation analysis and structural parameter design. Theoretical analysis and experiments show that the mass sensitivity of the designed sensor can reach 284. 16 kg / m 2 , which is higher than the linear IDT SAW sensor with the mass sensitivity of 185. 97 kg / m 2 . The results verify that IDT structure can effectively improve the mass sensitivity of the device and the feasibility of monitoring the pressure in a micro-gap environment.

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  • Received:
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  • Online: February 23,2023
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