In order to study the polarization characteristics of silver, platinum, glassy carbon, gold and copper electrodes and determine the best application scenario of each material electrode, a detailed theoretical analysis, model simulation and flume measurement of surface microelectrode types are carried out, and a polarization impedance evaluation method of surface microelectrode materials is obtained. The results show that the measurement accuracy of platinum and glassy carbon electrode is the best, the performance of silver electrode is slightly inferior to that of platinum and glassy carbon electrode, and the gold electrode can only be used above 50 kHz. In terms of accuracy, sensitivity and reliability, the comprehensive performance of glassy carbon electrodes is the best, followed by silver, platinum, gold and copper electrodes. Platinum and glassy carbon electrodes are more suitable for impedance spectroscopy applications, while silver, platinum and glassy carbon electrodes are very suitable for electrical impedance scanning or tomography. Silver, platinum and glassy carbon electrodes can be selected for lower frequency impedance measurement, while gold, platinum and glassy carbon electrodes can be selected for higher frequency.