无线无源柔性RFID压力传感器
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江南大学集成电路学院无锡214401

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TN98;TP212

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中央高校基本科研计划青年基金项目(JUSRP202501120)资助


Wireless passive flexible RFID-based pressure sensor
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School of Integrated Circuits, Jiangnan University, Wuxi 214401, China

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    摘要:

    针对柔性电子与物联网感知需求,设计并制备了一种集成超高频(ultra-high frequency, UHF)射频识别(radio frequency identification, RFID)技术与电容传感原理的无线无源柔性压力传感器。该传感器将传统RFID标签与电容单元相结合,可实现对压力的实时监测。研究基于外部压力与RFID信号相位变化之间的响应机制,即当外力施加于传感器时,其柔性介电层发生压缩形变,导电层间距离减小引起敏感单元的电容变化。这一变化改变了天线端口的反射边界条件,体现为阅读器接收信号相位的显著偏移。为优化传感器性能,实验分析了微金字塔结构介电层对传感器灵敏度的影响。性能测试结果表明,所研发的传感器在0~5 kPa的范围内表现出优异的响应特性,灵敏度可达4.011°/kPa,且检测上限可达20 kPa,显示出宽泛的线性检测范围与良好的稳定性。研究为UHF频段的无线实时压力检测提供了一个参考方案,有助于扩大无线无源压力传感器在可穿戴电子设备领域的应用范围。

    Abstract:

    A wireless passive flexible pressure sensor integrating ultra-high frequency (UHF) radio frequency identification (RFID) technology with capacitive sensing principles was designed and fabricated to address the sensing requirements of flexible electronics and the Internet of Things. The sensor combines a conventional RFID tag with a capacitive unit to enable real-time pressure monitoring. The response mechanism linking external pressure to the phase variation of the RFID signal was elucidated: under applied load, the flexible dielectric layer undergoes compressive deformation, reducing the spacing between conductive layers and thus altering the capacitance of the sensing element. This capacitance change modifies the reflection boundary condition at the antenna port, manifested as a pronounced phase shift in the reader-received signal. To optimize performance, the influence of a micro-pyramidal structured dielectric layer on sensitivity was experimentally investigated. Performance tests demonstrate that the developed sensor exhibits excellent response characteristics in the 0~5 kPa range, with a sensitivity of 4.011°/kPa and an upper detection limit of 20 kPa, evidencing a broad linear detection range and good stability. This work provides a reference scheme for wireless real-time pressure detection in the UHF band and promotes the potential application of wireless passive pressure sensors in the field of wearable electronic devices.

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贺刘劝,吴佳糠,梁峻阁,顾晓峰.无线无源柔性RFID压力传感器[J].电子测量与仪器学报,2026,40(7):280-288

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  • 在线发布日期: 2026-09-20
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