基于锯齿形电阻薄膜的柔性温度-压力双模态传感器研究
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1.北京信息科技大学北京市传感器重点实验室北京102206;2.北京信息科技大学机电工程学院北京102206; 3.北京信息科技大学理学院北京102206

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TH165;TN379

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国家自然科学基金(61771060)、北京市教育委员会科研计划(KZ20231123221)、北京市新世纪百千万人才工程培养项目(2019A20)、现代测控技术教育部重点实验室(2024202101)、北京信息科技大学北京市传感器重点实验室(2024202108)项目资助


Research on flexible temperature-pressure dual-mode sensors based on serrated resistive thin films
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1.Beijing Key Laboratory of Sensors,Beijing University of Information Science and Technology, Beijing 102206,China; 2.School of Mechanical and Electrical Engineering, Beijing University of Information Science and Technology, Beijing 102206,China; 3.College of Science, Beijing University of Information Science and Technology,Beijing 102206,China

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    摘要:

    针对柔性多模态传感器鲁棒性不足、抗压稳定性较差的问题,提出了一种基于锯齿形电阻薄膜的柔性温度压力双模态传感器(flexible temperature-pressure dual-mode sensor,FTPDMS),通过COMSOL Multiphysics与NI Multisim建立了传感器的温压数学模型,并优化了传感器的结构参数,以PI作为溅射掩膜,采用金属磁控溅射、剥离及聚二甲基硅氧烷(PDMS)弹性体浇注工艺完成了FTPDMS的制作。实验结果表明,该传感器在7 Pa~1 kPa、1~60 kPa和60~100 kPa压强范围内的灵敏度分别为-4.59、-0.1和-0.23 mV/kPa,非线性度分别为10.13%、7.75%和11.68%,压力响应时间约为303 ms,低压限为7 Pa,迟滞性为3.6%,重复性≥2 000次,恒压测试信号稳定;在27 ℃~ 67 ℃温度范围内,灵敏度为0.41 mV/℃,非线性度为6.25%,温度响应时间约为1.5 s。该传感器具备宽量程(100 kPa)、高灵敏度(-4.59 mV/kPa)、快速响应(303 ms)、高鲁棒性和抗压稳定性(重复循环次数≥2 000次)及低迟滞(3.6%)等优点,且制备工艺简单、成本低、环境友好,适用于医疗健康监测、电子皮肤和智能穿戴设备等领域。

    Abstract:

    To address the issues of insufficient robustness and poor pressure stability in flexible multimodal sensors, this paper proposes a flexible temperature-pressure dual-mode sensor (FTPDMS) based on a sawtooth-shaped resistive film. Mathematical models for the sensor’s temperature-pressure response were established using COMSOL Multiphysics and NI Multisim, and the structural parameters were optimised. Using PI as the sputtering mask, the FTPDMS was fabricated via a process involving metal magnetron sputtering, peeling, and Polydimethylsiloxane(PDMS)elastomer casting. Experimental results indicate that the sensor’s sensitivity within the pressure ranges of 7 Pa to 1 kPa, 1 to 60, and 60 kPa to 100 kPa is -4.59, -0.1 and -0.23 mV/kPa respectively, with nonlinearity of 10.13%, 7.75% and 11.68% respectively. The pressure response time is approximately 303 ms, the lower pressure limit is 7 Pa, the hysteresis is 3.6%, and the repeatability is ≥2 000 cycles; the signal remains stable during constant-pressure testing. Within the temperature range of 27 ℃~67 ℃, the sensitivity is 0.41 mV/℃, the non-linearity is 6.25%, and the temperature response time is approximately 1.5 s. This sensor offers advantages such as a wide measurement range (100 kPa), high sensitivity (-4.59 mV/kPa), fast response (303 ms), high robustness and pressure stability (≥2 000 cycles), and low hysteresis (3.6%). Furthermore, its fabrication process is simple, cost-effective and environmentally friendly, making it suitable for applications in medical health monitoring, electronic skin and smart wearable devices.

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张永豪,朴林华,孙嘉浩,王嘉瑄.基于锯齿形电阻薄膜的柔性温度-压力双模态传感器研究[J].电子测量与仪器学报,2026,40(8):100-110

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