热载荷作用下铜膜层对柔性电子复合薄膜热应力分布和电学特性影响的研究
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天津商业大学机械工程学院天津300134

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TO313;TN407

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国家自然科学基金(24JCZDJC00280)项目资助


Effect of copper film on thermal stress distribution and electrical properties of flexible electronic composite films under thermal load
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School of Mechanical Engineering, Tianjin University of Commerce, Tianjin 300134, China

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    摘要:

    为定量表征热载荷作用下铜膜层对柔性电子复合薄膜应变分布和电学特性的影响,建立了基于数字图像相关法的热变形测试工作站和电学测试站的综合测试系统,首先在柔性聚合物上通过磁控溅射方法制备了铜导电层厚度为50、100、200、500 nm的二维马蹄形柔性电子复合薄膜,并对柔性电子复合薄膜在恒速率加热条件下进行原位和全局变形检测和电信号稳定性检测。提取了二维马蹄形互连的热应变场,并重点分析了薄膜铜层附近单位面积内的应变场特征。结果表明,500 nm膜厚铜层在热载荷作用下与衬底配合关系最佳,样品整体应变成稳定趋势。同时配合电学测试站对样品进行电信号采集,发现随着铜膜层厚度增加,500 nm样品的电阻松弛至3 Ω,并在持续温度载荷下可以保持优异的工作稳定性。综上所述,通过建立热载荷测试系统揭示了不同金属层厚度对柔性电子复合薄膜衬底和金属层连接的热应变与信号传输效率的影响,实验表明了500 nm铜膜层样品在热载荷下的性能优势,为可拉伸电子元件的安全设计提供了理论依据。

    Abstract:

    To quantitatively characterize the effects of copper film layers on the strain distribution and electrical properties of flexible electronic composite films under thermal loading, this study establishes an integrated testing system comprising a thermal deformation test workstation based on digital image correlation and an electrical testing station. First, two-dimensional horseshoe-shaped flexible electronic composite films with copper conductive layers of 50, 100, 200, and 500 nm thickness are prepared on flexible polymers via magnetron sputtering. In-situ and global deformation detection and electrical signal stability testing of the films are conducted under constant-rate heating conditions. The thermal strain fields of the two-dimensional horseshoe-shaped interconnections are extracted, with particular emphasis on analyzing the strain field characteristics per unit area near the copper film layers. The results show that the 500 nm-thick copper film layer exhibits the optimal compatibility with the substrate under thermal loading, leading to a stable overall strain trend in the sample. Electrical signal acquisition via the electrical testing station reveals that as the copper film thickness increases, the resistance of the 500 nm sample relaxes to 3 Ω and maintains excellent operational stability under sustained temperature loading. In conclusion, this study reveals the effects of different metal layer thicknesses on the thermal strain at the substrate-metal interface and signal transmission efficiency of flexible electronic composite films through the established thermal loading testing system. Experiments demonstrate the performance advantages of the 500 nm copper film layer sample under thermal loading, providing a theoretical basis for the safety design of stretchable electronic components.

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王涛,陈诚,李子赟,刘星语,黄川,王紫阳,任春华.热载荷作用下铜膜层对柔性电子复合薄膜热应力分布和电学特性影响的研究[J].电子测量与仪器学报,2025,39(7):151-158

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