基于动态选通与抗亚稳态TDC的芯片延迟参数测量
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合肥工业大学微电子学院合肥230009

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TN791;TN98

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国家自然科学基金重大科研仪器研制项目( 62027815) 、国家自然科学基金(62274052,62174048)项目资助


Chip delay parameter measurement based on dynamic selection unit and anti-metastability TDCs
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School of Microelectronics, Hefei University of Technology, Hefei 230009,China

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    摘要:

    动态参数测试的核心是芯片延时的测量,在芯片制程缩小与复杂度激增的背景下,小延时缺陷已能引发严重的时序故障,亟需在芯片自动测试机(ATE)上实现高精度动态参数测试方案。针对这一需求,提出了一种基于现场可编程门阵列(FPGA)的混合测量架构:采用时序逻辑控制,组合逻辑完成功能的动态选通单元实现高精度、高灵活性的信号捕获,结合基于纳特插值法的三链式TDC架构,包含由相移时钟校准的粗测仲裁模块及由CARRY4级联而成的细测模块,基本消除了异步测量中电路产生亚稳态问题导致粗测数据产生较大误差的情况并具有较高的通用性。该系统通过选通单元与TDC协同工作,实现了对上升/下降时间、脉冲宽度、传输延迟及频率等动态参数的高速、高稳定性测量,兼具纳秒级测量速度与皮秒级分辨率。在Kintex-7上实现的TDC分辨率为12.019 ps,微分非线性(DNL)为[-0.80 LSB,4.67 LSB],积分非线性(INL)[-3.82 LSB,5.02 LSB],均方根精度为23.363 ps。完整系统在实际测量场景下完成了功能验证,并通过稳定性检测。

    Abstract:

    The core of AC parameter testing lies in chip delay measurement, with the continuous scaling of semiconductor processes and exponential growth of circuit complexity, even minor delay defects can now induce critical timing failures. The necessitates implementing high-precision dynamic parameter testing schemes on automatic test equipment (ATE). To address this requirement, a hybrid FPGA-based measurement architecture has been proposed: A dynamic selection unit combining timing logic control and combinational logic achieves high-precision, high flexibility signal capture. With a three-chain time-to-digital converter (TDC) based on Nutt interpolation methodology, incorporating a phase-shifted-clock-calibrated coarse measurement arbitration module and a CARRY4-cascaded fine measurement module. Significant errors in coarse measurement data induced by metastability phenomena within asynchronous circuits were eliminated through this structural configuration, while versatile compatibility with multiple measurement scenarios was preserved. Dynamic parameter quantification capabilities encompassing rise/fall time, pulse width, transmission delay, and frequency were achieved by synergistic interactions between the selection unit and TDC core, achieving concurrent nanosecond-level measurement velocity and picosecond-level resolution. The TDC resolution achieved on Kintex-7 is 12.019 ps, with a differential nonlinearity (DNL) of [-0.80 LSB,4.67 LSB], an integral nonlinearity (INL) of [-3.82 LSB,5.02 LSB], and a root-mean-square accuracy of 23.363 ps. Functional verification under practical measurement conditions and stability assessment protocols were implemented, with operational robustness in real-world applications being conclusively demonstrated.

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王斯禹,梁华国,黄杰,柏仕超,鲁迎春.基于动态选通与抗亚稳态TDC的芯片延迟参数测量[J].电子测量与仪器学报,2025,39(7):13-22

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