基于衍射理论的大深径比微小锥孔特征测量方法
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中国工程物理研究院机械制造工艺研究所绵阳621900

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TH744.5

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中物院发展项目专题(K1357)资助项目


Method for measuring the characteristics of small cone-hole with large aspect ratio based on diffraction theory
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Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621900, China

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    摘要:

    针对大深径比微小锥孔特征的测量需求,开展了关于锥孔零件衍射测量技术的研究。结合几何光学与物理光学中光波传递与衍射基本原理,探究了大深径比微小锥孔光斑成形机理,通过构建大深径比微小锥孔激光衍射数学模型,分析了光斑图像特征与微小锥孔特征间关系,建立了微小锥孔的锥度、直径的求解公式。研究过程中首先通过仿真计算的锥度及直径与仿真设定参数值的对比结果论证了建立数学模型的合理性,并利用搭建的实验平台开展激光透射微孔测试实验,利用拍摄获得的光斑图像提取光强分布曲线,并根据微小锥孔锥度及直径的求解公式计算获得了锥度值和直径值。实验结果表明,基于光斑衍射数学模型计算的光强曲线和实际光强曲线变化趋势基本一致,深径比为66.67的微小锥孔锥度及直径的测量误差分别为1.35%和2.78%,测量结果具备较好的精度,验证了提出测量方法的可行性。

    Abstract:

    In order to measure the small cone-hole with a large aspect ratio, the diffraction measurement technology of cone-hole is studied. Based on the basic principles of light wave transmission and diffraction in geometric optics and physical optics, this paper explores the forming mechanism of light spot with small cone hole with large aspect ratio. By constructing the mathematical model of laser diffraction with small cone hole with aspect ratio, the relationship between the image features of spot and the characteristics of small cone hole is analyzed, and the formula for solving the taper and diameter of small cone hole is established. In the research process, the rationality of establishing the mathematical model was demonstrated by comparing the taper and diameter calculated with the parameters set by the model, and the experimental platform was built to carry out the laser transmission micro-hole test experiment. The light intensity distribution curve was extracted by using the spot image obtained by the shooting, and the taper and diameter values were calculated according to the solution formula of the micro-taper and diameter. The results show that the variation trend of the light intensity curve calculated based on the mathematical model of spot diffraction is basically the same as that of the actual light intensity curve. The measurement errors of the taper and diameter of the tiny cone hole with an aspect ratio of 66.67 are 1.35% and 2.78%, respectively. The measurement results have good accuracy, which verifies the feasibility of the measurement method proposed in the paper.

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黄腾,廖路,张勇斌.基于衍射理论的大深径比微小锥孔特征测量方法[J].电子测量与仪器学报,2025,39(7):203-211

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  • 在线发布日期: 2025-10-21
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