一种新型应用于平面电容层析成像系统的电容阵列传感器设计
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辽宁石油化工大学信息与控制工程学院抚顺113000

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TN911.73

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辽宁省教育厅科研项目(L2015300)资助


Design of a novel capacitance array sensor for capacitance tomography system
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College of Information and Control Engineering, Liaoning Petrochemical University, Fushun 113000, China

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    摘要:

    平面电容层析成像(ECT)技术适用于复合材料表面/亚表面缺陷探伤检测,或传感器安装受限制等无损检测应用领域。针对常规平面ECT系统所采用的方形结构阵列传感器灵敏度分布均匀性较差、中心区域成像质量不高的问题,提出了一种新型结构阵列平面电容传感器,该传感器由7个单元传感电极构成蜂巢结构阵列。新型结构阵列传感器由COMSOLTM专业软件进行建模分析,并设定静电场边界条件,求解并获得传感器的电场分布、极间电容值以及计算灵敏度矩阵。通过与相同尺寸的3×3方形阵列传感器进行比较,来评估新型结构阵列传感器的关键性能,即极间电容变化值和灵敏度分布均匀性。此外,传感器实物采用印刷电路板技术设计制作,结合线性反投影算法进行图像重建,比较和验证两种结构传感器的成像性能。经过数值成像实验和实物重建图像测试,结果表明,新型结构阵列传感器有利于电容传感信号检测,改善了传感器灵敏度分布均匀性,提高了平面ECT系统中心区域成像质量。

    Abstract:

    Planar electrical capacitance tomography (ECT) is suitable for non-destructive testing applications such as surface/subsurface defect detection of composite materials, or limited sensor installation. A new planar capacitive sensor with a new structure array is proposed aiming at the problems of poor sensitivity distribution uniformity and low imaging quality of the central region of the square array sensors used in conventional ECT systems. The sensor consists of a honeycomb array of seven sensing electrodes. The new structure array sensor is modeled and analyzed by COMSOLTM professional software, and the electrostatic field boundary conditions are set, and the electric field distribution, electrode capacitance value and sensitivity matrix of the sensor are obtained. By comparing with the 3×3 square array sensor of the same size, the key performance of the new structure array sensor, that is, the change value of the electrode capacitance and the uniformity of the sensitivity distribution, is evaluated. What’s more, the physical sensor is manufactured using printed circuit board technology combined with linear back-projection algorithm for image reconstruction, and the imaging performance of the two structures of sensors is verified. The results of numerical imaging experiments and test of reconstructed images show that the new structure array sensor is beneficial to the detection of capacitive sensing signals, improves the uniformity of sensor sensitivity distribution, as well as the imaging quality of the central area of the ECT system.

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郭志恒,任嘉铭.一种新型应用于平面电容层析成像系统的电容阵列传感器设计[J].电子测量与仪器学报,2024,38(6):195-203

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  • 在线发布日期: 2024-10-11
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