电容对石英晶体微天平质量灵敏度影响分析
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重庆交通大学机电与车辆工程学院

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TN752.2

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Analysis of influence of capacitance on mass sensitivity of quartz crystal microbalances
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    摘要:

    为了探究振荡电路中电容对石英晶体微天平质量灵敏度的影响,提出了振荡电路的等效电路模型阻抗分析方法。首先,建立了等效电路模型,分析了其阻抗与频率的关系,揭示了电容容值与其质量灵敏度对应关系;其次,进行了多物理场耦合仿真实验,探究了电容容值对石英晶体微天平质量灵敏度的影响规律;最后,搭建实验系统平台,进行了石英晶体微天平质量灵敏度实验。结果表明,并联电容对石英晶体微天平质量灵敏度影响较小;串联1.01pF电容时质量灵敏度提升8.01×10-2 Hz/ng,串联15.84pF电容时质量灵敏度提升1.49×10-2Hz/ng。该结论有助于更好地理解电容对石英晶体微天平质量灵敏度影响,为该传感器便携化、微型化设计提供了有力支持。

    Abstract:

    In order to investigate the influence of capacitance on the mass sensitivity of quartz crystal microbalances in oscillating circuits, an equivalent circuit model impedance analysis method for oscillating circuits is proposed. Firstly, an equivalent circuit model was established, and the relationship between impedance and frequency was analyzed, revealing the correspondence between capacitance and mass sensitivity; Secondly, multiple physical field coupling simulation experiments were conducted to explore the influence of capacitance on the mass sensitivity of quartz crystal microbalances; Finally, an experimental system platform was built and a quartz crystal microbalance mass sensitivity experiment was conducted. The results indicate that parallel capacitors have a relatively small impact on the mass sensitivity of quartz crystal microbalances; When a 1.01pF capacitor is connected in series, the mass sensitivity increases by 8.01×10-2 Hz/ng, and when a 15.84pF capacitor is connected in series, the mass sensitivity increases by 1.49×10-2Hz/ng. This conclusion helps to better understand the influence of capacitance on the mass sensitivity of quartz crystal microbalances, providing strong support for the portable and miniaturized design of the sensor.

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  • 收稿日期:2023-12-25
  • 最后修改日期:2024-05-06
  • 录用日期:2024-05-10
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