A non-contact optical microcavity liquid pressure measurement system
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1.Key Laboratory of Special Optical Fiber and Optical Access Network, Shanghai University,Shanghai 200444,China; 2.College of Mechanical and Power Engineering, East China University of Science and Technology,Shanghai 200000,China; 3.Mingche Biotechnology (Suzhou) Co., Ltd.,Suzhou 215100,China

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TN219

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    Abstract:

    In order to meet the demand of measuring liquid pressure in narrow chamber, this paper designs a non-contact Fabry-Perot microcavity based optical liquid pressure measuring system. The optical microcavity is fabricated by two-photon 3D printing technology, with a compact size of 350 μm. The diaphragms with a thickness of 4 μm and 6 μm were designed. The system is based on combination of the embedded design and diffraction grating spectral module, which can acquire the optical interference signal, realizing high-resolution spectrum dynamic demodulation. The experiments show that the sensing sensitivity of the 4 μm-thickness device can reach 398 pm/kPa at room temperature (25 ℃), and the system shows a high resolution of 35.5 Pa and good repeatability, which has potential in biomedical intraocular pressure sensing applications.

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  • Received:
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  • Online: July 10,2024
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