Abstract:For the radio frequency micro-electro-mechanical system (RF MEMS) switch life test, the cost is high, the test connection is complex, and with the size of the RF MEMS switch shrinking, the traditional test efficiency is low, and the test task can only be carried out in the laboratory. In this paper, a RF micro-electro-mechanical switch test system with functions of signal generation, real-time waveform monitoring, lifetime calculation, data recording and test report printing is set up, and a RF micro-electro-mechanical switch is tested and evaluated preliminarily with this system. The results show that the design has well completed the test of the switch voltage, switch time, cold life, and thermal life of the RF micro-electro-mechanical system switch, and can meet the test requirements of the RF micro-electro-mechanical system switch, which proves the practicability of the test system and the accuracy of the test work.