Design and research of L~Ka band MEMS SPDT switch

Home > Archive>Volume 45, Issue 8, 2022 >7-13

Design and research of L~Ka band MEMS SPDT switch
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                        Wu QiannanWu Qiannan
1.Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China; 2.School of Science, North University of China, Taiyuan 030051, China; 3.Center for Microsystem Intergration North University of China, North University of China, Taiyuan 030051, China
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Fan LinaFan Lina
1.Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China; 2.School of Science, North University of China, Taiyuan 030051, China
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Li MengweiLi Mengwei
1.Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China; 2.School of Science, North University of China, Taiyuan 030051, China
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Affiliation:1.Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China; 2.School of Science, North University of China, Taiyuan 030051, China; 3.Center for Microsystem Intergration North University of China, North University of China, Taiyuan 030051, China
Clc Number:TN389
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Abstract:

Aiming at the problems of large volume, poor insertion loss and isolation of MEMS SP7T switch at present, a kind of SP7T MEMS switch based on "meter" power divider is designed. RF MEMS switch unit and "meter" power divider are designed by HFSS software, and the S parameter and standing wave ratio of the switch are simulated and studied. The mechanical performance of RF MEMS switch unit is analyzed by COMSOL software. The results show that the insertion loss of each 端口 of SP7T MEMS switch is better than 0.45dB@40GHz, the isolation is better than 29.5dB@40GHz, the standing wave ratio is less than 1.45, and the volume is only 0.65 mm× 0.5 mm× 0.5 mm. This design can be integrated with filters, attenuation resistors, antennas, etc. It can be used in multi-channel tunable MEMS devices, and has certain application value in satellite communication, radar and microwave test systems.

Key words:Single Pole Seven Throw Switch; MEMS; Meter-shaped Power Divider; Small Size; Low Insertion Loss

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Online: May 10,2024
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