Circular Thermopile Infrared Detector structure optimization and simulation analysis

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Circular Thermopile Infrared Detector structure optimization and simulation analysis
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                        Wu Xuezhan1Wu Xuezhan
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China
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Lei Cheng1Lei Cheng
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China
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Liang Ting1Liang Ting
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China
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Guan Yihao1Guan Yihao
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China
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Ma Ye1Ma Ye
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China
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Bai Yuehang1Bai Yuehang
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China
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Qi Lei2Qi Lei
North Automatic Control Technology Institute，Taiyuan, 030006,China
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Affiliation:1.Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051,China; 2. North Automatic Control Technology Institute，Taiyuan, 030006,China
Clc Number:TN377
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Abstract:

In order to study the influence relationship between the output voltage of the infrared detector made by the thermopile principle and the key structure size, to obtain a high output voltage, a microelectromechanical system (MEMS) Thermopile Infrared Detector based on circular structure was proposed. The size of the infrared detector is 1.8mm×1.8mm×0.35mm and the cavity size was 1.2mm as the research basis of modeling and simulation. Modeling the Infrared Detectors, by changing the absorption layer coverage length, thermocouple logarithm, the cold end, presence of etching rules hole size parameters of the key structure, such as the Infrared Detector thermoelectric heat simulation and path analysis, ultimately determine the optimal infrared detector simulation results, the simulation results show that by changing the Thermopile Infrared Detector size parameters of the key structure, The output voltage of the designed Infrared Detector is up to 125.08μV, which greatly improves the output voltage of the external Infrared Detector compared with the traditional four-terminal beam structure.

Key words:Infrared Detector; Thermopile; Finite Element Analysis; Seebeck effect; infrared

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Online: September 05,2024
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