The precision positioning technology plays an important role in products precision machining, precision testing. A method of precision positioning with airbearing platform driven by linear motor is introduced in this paper. The working principle and designing plan of air bearing platform are described. The control model of the linear motor is given. And then a closedloop control is achieved with this new driver. Finally, platform location data were compared with LenScan position device, and the accuracy of the positioning platform is verified. The result shows that the platform structure is reliable and the system is stable. That the accuracy of X and Y directions is micrometer lever and meets the requirement. Now it is used in testing of geometry parameters of semiconductor devices, and the effect is good.