A vibration damping design of MEMS AHRS has been proposed to reduce the effect of vibration environment. The effect of vibration environment on the MEMS AHRS performance has been analyzed based on the working principle of the MEMS inertial sensors. A damping structure of MEMS AHRS has been designed. And a variable step size adaptive smoothing filter used to smooth the vibration acceleration has been designed based on the characteristics of MEMS inertial sensors under the vibration environment. Then, the smoothed acceleration and the gyroscopes’ information were fused to realize the attitude estimation under the vibration environment. The damping design and the data processing algorithm of MEMS AHRS under the vibration environment has been proved by the vibration test.

TP202+.1