IC equipment is in the upstream of the IC industry chain, which is an important part of the whole industry. It is of strategic significance for the industrial chain to establish an advanced, safe and reliable equipment industry system in China. IC equipment is an industry with very high technology threshold, resulting in the entire industry by the United States, Japan and the Netherlands a small number of giants highly monopolized. Starting from the analysis of the overall situation of manufacturers, technology status and R&D investment gap, this paper finds that there are some problems in China's integrated circuit equipment industry, such as strong dependence on sales progress of domestic equipment, ineffective integration of domestic equipment with large-scale wafer production lines, and heavy dependence on imports of sealing and testing equipment. Combined with the actual development of the industry, this paper analyzes the current situation and challenges, and makes suggestions on the development of China's integrated circuit equipment industry in this context.