基于改进 YOLOv8s-seg的轻量化晶圆缺陷检测算法
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四川大学机械工程学院 成都 610000

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TP391.41;TN405

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Lightweight wafer defect detection algorithm based on improved YOLOv8s-seg
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School of Mechanical Engineer, Sichuan University, Chengdu 610000, China

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    摘要:

    晶圆缺陷检测是半导体制造流程中保障产品质量的关键环节,分析缺陷的分布区域与呈现模式,能够精准追溯生产工艺中的薄弱环节,为制造技术的优化提供重要依据。针对复杂场景下混合模式晶圆缺陷的识别检测高精度、实时性及轻量化的需求,提出一种基于改进YOLOv8s-seg的轻量化晶圆图缺陷检测算法。该算法首先在主干特征提取网络中引入上下文引导机制优化C2f模块,其次提出移位增强多分支多尺度融合特征金字塔网络(SEMF-FPN),提高模型的特征融合能力,最后引入轻量化非对称检测头思想优化头部网络。实验结果显示,改进模型边界框和掩码的平均精度均值mAP@0.5:0.95分别达90.9%和84.5%,检测速度达到了333.3 fps,在精度损失不超过0.5%的前提下实现了参数量和计算量54.84%和37.18%的大幅减少,模型轻量化、精度高且检测快速,满足工业生产的需要,具有一定的工程应用价值。

    Abstract:

    Wafer defect detection is a critical step in ensuring product quality within semiconductor manufacturing processes. Analyzing the distribution areas and presentation patterns of defects enables precise tracing of weak links in production processes, providing essential evidence for optimizing manufacturing technologies. To address the demands for high precision, real-time processing, and lightweight solutions in identifying hybrid wafer defects under complex scenarios, this paper proposes a lightweight wafer map defect detection algorithm based on an improved YOLOv8s-seg. The algorithm first introduces a context-guided mechanism within the backbone feature extraction network to optimize the C2f module. It then proposes a shift-enhanced multi-branch & scale fusion feature pyramid network (SEMF-FPN) to enhance the model′s feature fusion capabilities. Finally, it incorporates lightweight asymmetric detector head concepts to optimize the head network. Experimental results demonstrate that the improved model achieves mean average precision (mAP@0.5:0.95) of 90.9% for bounding boxes and 84.5% for masks, with a detection speed of 333.3 fps. It significantly reduces parameters and computational load by 54.84% and 37.18%, respectively, while maintaining accuracy loss below 0.5%. This lightweight, high-precision and fast-detection model meets industrial production requirements and holds considerable engineering application value.

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余欣,缪佳欣,龙浩辰,郝彦哲,刘晓宇.基于改进 YOLOv8s-seg的轻量化晶圆缺陷检测算法[J].电子测量技术,2026,49(10):1-11

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  • 在线发布日期: 2026-08-25
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